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- 半导体｜三星电子在生产线上试用韩国企业加工的氟化氢
半导体｜三星电子在生产线上试用韩国企业加工的氟化氢
Release time：2019-09-06
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source：techweb
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9月5日消息，据国外媒体报道，三星电子开始在半导体生产线上试用韩国企业加工的氟化氢。
三星
知情人士称，自8月下旬起，三星电子开始在一条生产线上使用韩国企业供应的氟化氢。氟化氢被用于晶圆的清洗等方面。
此次投入量产线的是从中国进口、由韩国企业加工的氟化氢。
在高纯度的氟化氢市场，日本厂商大约占据8至9成份额。三星电子对于是否全面采用日本造以外的氟化氢仍持谨慎态度。
今年7月，就有外媒报道三星电子在半导体工厂试验新材料的生产线上，开始投入日本以外厂商的氟化氢进行试验，这些产品被认为来自中国大陆、中国台湾和韩国厂商。
上月，外媒还报道，三星电子正在从总部位于比利时的公司采购用于制造半导体芯片的化学材料，以替代日本厂商。外媒未披露公司名称，但有分析认为，该公司应该是日本化学企业JSR和比利时研究机构IMEC2016年设立的合资公司EUV Resist。
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